Bronkhorst EX-FLOW Mass Flow Manual de usuario Pagina 5

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BRONKHORST HIGH-TECH B.V.
TABLE OF CONTENTS
1 Intrinsic safe sensors
1.1 General description .................................................................................................................. page 7
1.2 Principle of operation of flow sensor ........................................................................................ page 7
1.3 Sensor and laminar flow device of flow sensor ....................................................................... page 7
1.4 Bronkhorst High-Tech B.V. flowhead ....................................................................................... page 8
1.5 Gas conversion factors ............................................................................................................ page 9
1.5.1 Software for conversion factor calculation ............................................................................... page 10
1.6 Control valve ............................................................................................................................ page 11
1.6.1 Introduction .............................................................................................................................. page 11
1.6.2 Kv-value calculation ................................................................................................................. page 12
1.6.3 Maximum pressure drop .......................................................................................................... page 12
1.7 Ex-proof Coils .......................................................................................................................... page 13
1.7.1 Introduction .............................................................................................................................. page 13
1.7.2 Style XB-coil ............................................................................................................................. page 13
1.7.3 Style XC-coil ............................................................................................................................ page 13
2 Installation
2.1 Receipt of equipment ............................................................................................................... page 14
2.2 Return shipment ....................................................................................................................... page 14
2.3 Service ..................................................................................................................................... page 14
2.4 Mounting .................................................................................................................................. page 15
2.5 In-line filter ............................................................................................................................... page 15
2.6 Gas connections ...................................................................................................................... page 15
2.7 Piping ....................................................................................................................................... page 16
2.8 Electrical connections .............................................................................................................. page 16
2.9 Caution ..................................................................................................................................... page 16
2.10 Supply pressure ....................................................................................................................... page 17
2.11 System purging ........................................................................................................................ page 17
2.12 Seals ........................................................................................................................................ page 17
2.13 Equipment storage ................................................................................................................... page 17
3 Operation
3.1 General .................................................................................................................................... page 18
3.2 Power and warm-up ................................................................................................................. page 18
3.3 Start-up .................................................................................................................................... page 18
3.4 Operating conditions ................................................................................................................ page 18
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